Title :
Re-Evaluation of Proposed Microfabrication Process Cost Calculator
Author :
Provine, J. ; Yama, Gary
Author_Institution :
Electr. Eng. Dept., Stanford Univ., Stanford, CA, USA
Abstract :
We provide a cost calculation of running a pair of example nanofabrication processes in the Stanford Nanofabrication Facility and the University of California, Berkeley´s Marvell Nanofabrication Laboratory. Cost analysis for a MEMS membrane process and a photonic waveguide process for each facility will be shown at the symposium. In this abstract the outline for the MEMS membrane process at SNF is provided as an example.
Keywords :
costing; microfabrication; micromechanical devices; nanofabrication; MEMS membrane process; cost analysis; cost calculation; microfabrication process cost calculator; nanofabrication processes; photonic waveguide process; Calculators; Educational institutions; Metals; Micromechanical devices; Nanofabrication; Photonics; Wires;
Conference_Titel :
University/Government/Industry, Micro/Nano Symposium (UGIM), 2012 19th Biennial
Conference_Location :
Berkeley, CA
Print_ISBN :
978-1-4577-1751-2
Electronic_ISBN :
0749-6877
DOI :
10.1109/UGIM.2012.6247109
