DocumentCode
2710546
Title
Re-Evaluation of Proposed Microfabrication Process Cost Calculator
Author
Provine, J. ; Yama, Gary
Author_Institution
Electr. Eng. Dept., Stanford Univ., Stanford, CA, USA
fYear
2012
fDate
9-10 July 2012
Firstpage
1
Lastpage
2
Abstract
We provide a cost calculation of running a pair of example nanofabrication processes in the Stanford Nanofabrication Facility and the University of California, Berkeley´s Marvell Nanofabrication Laboratory. Cost analysis for a MEMS membrane process and a photonic waveguide process for each facility will be shown at the symposium. In this abstract the outline for the MEMS membrane process at SNF is provided as an example.
Keywords
costing; microfabrication; micromechanical devices; nanofabrication; MEMS membrane process; cost analysis; cost calculation; microfabrication process cost calculator; nanofabrication processes; photonic waveguide process; Calculators; Educational institutions; Metals; Micromechanical devices; Nanofabrication; Photonics; Wires;
fLanguage
English
Publisher
ieee
Conference_Titel
University/Government/Industry, Micro/Nano Symposium (UGIM), 2012 19th Biennial
Conference_Location
Berkeley, CA
ISSN
0749-6877
Print_ISBN
978-1-4577-1751-2
Electronic_ISBN
0749-6877
Type
conf
DOI
10.1109/UGIM.2012.6247109
Filename
6247109
Link To Document