Title :
A Linearity Improvement Technique for Thin-film Barium Strontium Titanate Capacitors
Author :
Fu, Jia-Shiang ; Zhu, Xinen Alfred ; Chen, Ding-Yuan ; Phillips, Jamie D. ; Mortazawi, Amir
Author_Institution :
Michigan Univ., Ann Arbor, MI
Abstract :
A device architecture is proposed to improve the linearity of barium strontium titanate (BST) capacitors while maintaining the tunability and the quality factor. Thin-film parallel plate capacitors are fabricated utilizing the proposed architecture. The measurement results successfully demonstrate the effectiveness of this approach. Up to 14 dB of improvement on IIP3 is observed
Keywords :
Q-factor; barium compounds; strontium compounds; thin film capacitors; tuning; intermodulation distortion; linearity improvement technique; parallel plate capacitors; quality factor; thin-film barium strontium titanate capacitors; tunable capacitor; Barium; Binary search trees; Capacitors; Electrodes; Ferroelectric materials; Linearity; Strontium; Titanium compounds; Transistors; Voltage; Barium strontium titanate (BST); ferroelectric; intermodulation distortion; linearity; tunable capacitor;
Conference_Titel :
Microwave Symposium Digest, 2006. IEEE MTT-S International
Conference_Location :
San Francisco, CA
Print_ISBN :
0-7803-9541-7
Electronic_ISBN :
0149-645X
DOI :
10.1109/MWSYM.2006.249654
