DocumentCode
2711389
Title
Vibrating RF MEMS for Timing and Frequency References
Author
Hsu, Wan-Thai
Author_Institution
Discera, Ann Arbor, MI
fYear
2006
fDate
11-16 June 2006
Firstpage
672
Lastpage
675
Abstract
This paper presents recent progresses on making vibrating RF MEMS oscillators for timing and frequency reference applications. Starting from the performance requirements of an oscillator in various systems, the key aspects of MEMS oscillators, including resonator design, oscillator performances, temperature compensation, packaging and integrations, are reviewed. Future directions of the research are also suggested at the end of the paper
Keywords
compensation; crystal oscillators; crystal resonators; electronics packaging; micromechanical resonators; MEMS resonator; RF MEMS oscillators; packaging process; temperature compensation; Acoustic beams; Frequency; Laser excitation; Micromechanical devices; Oscillators; Packaging; Q factor; Radiofrequency microelectromechanical systems; Temperature; Timing; RF MEMS; micromechanical resonators; oscillators;
fLanguage
English
Publisher
ieee
Conference_Titel
Microwave Symposium Digest, 2006. IEEE MTT-S International
Conference_Location
San Francisco, CA
ISSN
0149-645X
Print_ISBN
0-7803-9541-7
Electronic_ISBN
0149-645X
Type
conf
DOI
10.1109/MWSYM.2006.249704
Filename
4014992
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