High-Aspect-Ratio SOI Vibrating Micromechanical Resonators and Filters

Author

Ayazi, Farrokh ; Pourkamali, Siavash ; Ho, Gavin K. ; Abdolvand, Reza

Author_Institution

Georgia Inst. of Technol., Atlanta, GA

fYear

2006

fDate

11-16 June 2006

Firstpage

676

Lastpage

679

Abstract

This paper presents a review of single crystal silicon bulk acoustic wave resonators and filters. Silicon-on-insulator (SOI) substrates are utilized to implement high quality factor (Q) integrated silicon resonators with capacitive and/or piezoelectric transducers. These resonators cover a wide range of frequencies including HF, VHF and UHF

Keywords

Q-factor; acoustic filters; acoustic resonators; bulk acoustic wave devices; capacitive sensors; micromechanical resonators; piezoelectric transducers; silicon-on-insulator; bulk acoustic wave resonators; capacitive transducers; integrated silicon resonators; micromechanical filters; micromechanical resonators; piezoelectric transducers; quality factor; silicon-on-insulator substrates; Acoustic waves; Equations; Impedance; Micromechanical devices; Piezoelectric transducers; Q factor; Resonance; Resonant frequency; Resonator filters; Silicon; MEMS; Micromechanical resonators; SOI; bulk acoustic wave resonator; micromechanical filters;

fLanguage

English

Publisher

ieee

Conference_Titel

Microwave Symposium Digest, 2006. IEEE MTT-S International

Conference_Location

San Francisco, CA

ISSN

0149-645X

Print_ISBN

0-7803-9541-7

Electronic_ISBN

0149-645X

Type

conf

DOI

10.1109/MWSYM.2006.249705

Filename

4014993