Highly Miniaturized Multilayer Superconducting Filter

A multilayer superconducting filter is reported for the first time in this paper. The filter employs highly miniature lumped element components embedded within four metal layers. The 150 nm thick dielectric layer between metal layers of the process allows for the realization of capacitors with high values of capacitance. A 3-pole filter has been developed, fabricated, and tested. This filter has a measured center frequency of 1.28 GHz, and is only 2.0 mm by 0.6 mm in size. The filter structure is amenable to superconductor microelectronics technology and can be integrated monolithically with a superconducting receiver on a single chip