Title :
THz uncooled microbolometer array development for active imaging and spectroscopy applications
Author :
Simoens, François ; Meilhan, Jérôme ; Pocas, Stéphane ; Ouvrier-Buffet, Jean-Louis ; Maillou, Thierry ; Gellie, Pierre ; Barbieri, Stefano
Author_Institution :
CEA Leti-MINATEC, Grenoble, France
Abstract :
A first prototype of 320×240 antenna-coupled un-cooled a-Si micro-bolometers array has been designed and processed. Beam profiles emitted by THz QCLs have been imaged while different samples were introduced in the THz beam optical path. We report first essays of material identification.
Keywords :
amorphous semiconductors; bolometers; elemental semiconductors; quantum cascade lasers; silicon; submillimetre wave antennas; submillimetre wave imaging; terahertz spectroscopy; terahertz wave imaging; THz QCL; THz beam optical path; THz uncooled microbolometer array; active imaging; antenna-coupled uncooled a-Si microbolometer array; beam profile; quantum cascade laser; spectroscopy application; Arrays; Imaging; Laser beams; Materials; Optical beams; Pixel; Quantum cascade lasers;
Conference_Titel :
Infrared Millimeter and Terahertz Waves (IRMMW-THz), 2010 35th International Conference on
Conference_Location :
Rome
Print_ISBN :
978-1-4244-6655-9
DOI :
10.1109/ICIMW.2010.5612553
