Title :
Gas sensor test chip
Author :
Buehler, MI G. ; Ryan, M.A.
Author_Institution :
Jet Propulsion Lab., California Inst. of Technol., Pasadena, CA, USA
Abstract :
A new test chip has been developed to characterize conducting polymers used in gas sensors. The chip, a seven layer cofired alumina substrate with gold electrodes, contains 11 comb and U-bend test structures. The structures are designed to measure the sheet resistance, conduction anisotropy, and peripheral conduction of spin coated films that are not subsequently patterned. The resistance of the polypyrrole films change by a few percent in response to various alcohols. Results from the test chip revealed that the vapor response depends on electrode geometry
Keywords :
conducting polymers; electric resistance measurement; electron device testing; gas sensors; polymer films; U-bend resistor; alcohol; cofired alumina substrate; comb resistor; conducting polymer; conduction anisotropy; gas sensor test chip; gold electrode; peripheral conduction; polypyrrole; sheet resistance; spin coated film; Anisotropic conductive films; Anisotropic magnetoresistance; Electrical resistance measurement; Electrodes; Gas detectors; Geometry; Gold; Polymers; Semiconductor device measurement; Testing;
Conference_Titel :
Microelectronic Test Structures, 1996. ICMTS 1996. Proceedings. 1996 IEEE International Conference on
Conference_Location :
Trento
Print_ISBN :
0-7803-2783-7
DOI :
10.1109/ICMTS.1996.535629
