High-Precision and Decomposition Control of Several Permanent Magnet Linear Motors for Magnetic Levitation

In this paper, we introduce two position control scheme; the lead-lag control and the sliding mode control for a stage system, which is levitated and driven by electric magnetic actuators. This consists of a levitating object (called platen) with 4 permanent magnetic linear synchronous motors in parallel. Each motor generates vertical force for suspension against gravity and propulsion force horizontally as well. This stage can generate six degrees of freedom motion by the vertical and horizontal forces. Dynamic equations of the stage system are derived simply. The sliding mode control algorithm is more effective than the lead-lag control algorithm to reduce effects from movements and disturbances of other axis