• DocumentCode
    271235
  • Title

    Prevention of convex corner undercutting in fabrication of silicon microcantilevers by wet anisotropic etching

  • Author

    Jović, V. ; Lamovec, J. ; Mladenović, I. ; Smiljanić, M.M. ; Popović, B.

  • Author_Institution
    Inst. of Chem., Technol. & Metall., Univ. of Belgrade, Belgrade, Serbia
  • fYear
    2014
  • fDate
    12-14 May 2014
  • Firstpage
    163
  • Lastpage
    166
  • Abstract
    This paper presents microcantilever fabrication on {100} oriented Si substrate using bulk micromachining technique. Detailed characteristics of convex corner compensation design for 〈100〉 oriented beam for two etching solutions: 25 wt. % TMAH and 30 wt. % KOH water solutions at 80 °C are given.
  • Keywords
    cantilevers; etching; micromachining; micromechanical devices; silicon; KOH; Si; bulk micromachining technique; convex corner compensation design; convex corner undercutting; etching solutions; silicon microcantilever fabrication; temperature 80 C; water solutions; wet anisotropic etching; Fabrication; Micromachining; Shape; Silicon; Substrates; Wet etching;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Microelectronics Proceedings - MIEL 2014, 2014 29th International Conference on
  • Conference_Location
    Belgrade
  • Print_ISBN
    978-1-4799-5295-3
  • Type

    conf

  • DOI
    10.1109/MIEL.2014.6842111
  • Filename
    6842111
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=271235