Title :
Micromachined arrays of air-bridge GaAs Schottky diodes for THz cameras
Author :
Casini, R. ; Dominijanni, D. ; Giovine, E. ; Ortolani, M. ; Gatta, F. ; D´Amico, A. ; Foglietti, V.
Author_Institution :
Ist. di Fotonica e Nanotecnol., CNR, Rome, Italy
Abstract :
We present the fabrication and test of arrays of GaAs Schottky diodes with sub-micrometric junction area and negligible parasitic capacitances working as rectifying detectors at sub-THz frequencies. GaAs Micromachining techniques are used to decrease the cross talking between adjacent diode detectors.
Keywords :
Schottky diodes; cameras; gallium arsenide; terahertz wave imaging; GaAs; Schottky diode; THz camera; diode detector; micromachined array; micromachining technique; submicrometric junction area; Fabrication; Gallium arsenide; Junctions; Noise; Resistance; Schottky diodes;
Conference_Titel :
Infrared Millimeter and Terahertz Waves (IRMMW-THz), 2010 35th International Conference on
Conference_Location :
Rome
Print_ISBN :
978-1-4244-6655-9
DOI :
10.1109/ICIMW.2010.5612590
