Effect of patterned copper layer on selective polymer removal by 355 nm laser

Author

Balogh, Baht ; Gordon, Péter ; Berényi, Richard ; Illyefalvi-Vitéz, Zsolt

fYear

2004

fDate

12-15 Sept. 2004

Firstpage

237

Lastpage

241

Keywords

Chemical lasers; Chemical technology; Copper; Drilling; Etching; Laser modes; Optical control; Optical materials; Polymers; Pump lasers;

fLanguage

English

Publisher

ieee

Conference_Titel

Polymers and Adhesives in Microelectronics and Photonics, 2004. POLYTRONIC 2004. 4th IEEE International Conference on

Print_ISBN

0-7803-8744-9

Type

DOI

10.1109/POLYTR.2004.1402768

Filename

1402768

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