Title :
A Study of Fabry-Perot Optical MEMS Pressure Senor
Author :
Ge, Yixian ; Wang, Ming ; Yan, Haitao
Author_Institution :
Sch. of Phys. Sci. & Technol., Nanjing Normal Univ., Nanjing
Abstract :
The optical MEMS pressure sensor with a planar and mesa membrane is presented. The operating principle of the MEMS pressure sensor is expatiated by the Fabry-Parot (F-P) interference and the relation between deflection and pressure is analyzed. The fabrication of each diaphragm is described. A phase demodulation method based on a Fourier transformation is explored, which can reduce errors resulting from intensity variations of a light source. Experimental results demonstrate that the sensor has reasonable linearity, sensitivity, and a wide pressure measurement range.
Keywords :
Fabry-Perot interferometers; Fourier transforms; demodulation; fibre optic sensors; microsensors; pressure sensors; Fabry-Parot interference; Fourier transformation; intensity variations; mesa membrane; optical MEMS pressure sensor; optical fiber sensor; phase demodulation method; Biomembranes; Demodulation; Fabry-Perot; Interference; Light sources; Linearity; Micromechanical devices; Optical device fabrication; Optical sensors; Pressure measurement; F-P interference; MEMS; mesa membrane; optical fiber sensor; phase demodulation;
Conference_Titel :
PhotonicsGlobal@Singapore, 2008. IPGC 2008. IEEE
Conference_Location :
Singapore
Print_ISBN :
978-1-4244-3901-0
Electronic_ISBN :
978-1-4244-2906-6
DOI :
10.1109/IPGC.2008.4781338
