Title :
Study of the Spatiotemporal Evolution of Microwave Plasma in Argon
Author :
Baeva, Margarita ; Andrasch, Mathias ; Ehlbeck, Jörg ; Weltmann, Klaus-Dieter ; Loffhagen, D.
Author_Institution :
INP Greifswald, Greifswald, Germany
Abstract :
The knowledge of the distribution of electromagnetic field and plasma parameters is of crucial importance for the development of microwave plasma sources. To that purpose, a time-dependent 2-D fluid model accompanying experiments has been applied to investigate the coupling between the plasma flow and kinetics and the propagating microwaves.
Keywords :
argon; high-frequency discharges; plasma diagnostics; plasma flow; plasma kinetic theory; plasma sources; spatiotemporal phenomena; Ar; argon; electromagnetic field; microwave plasma sources; plasma flow; plasma kinetics; plasma parameters; spatiotemporal evolution; time-dependent 2D fluid model; Argon; Atmospheric modeling; Microwave imaging; Microwave measurement; Microwave propagation; Plasma sources; Plasma diagnostics; plasma simulation; plasma sources; plasma sources.;
Journal_Title :
Plasma Science, IEEE Transactions on
DOI :
10.1109/TPS.2014.2323555
