DocumentCode :
2713346
Title :
Fabrication of Blue-Light Emitting Tantalum Oxide Films by Radio-Frequency Sputtering
Author :
Miura, K. ; Miyazaki, H. ; Hanaizumi, O.
Author_Institution :
Grad. Sch. of Eng., Gunma Univ., Kiryu
fYear :
2008
fDate :
8-11 Dec. 2008
Firstpage :
1
Lastpage :
3
Abstract :
We obtained blue photoluminescence from tantalum oxide films deposited by radio-frequency sputtering after annealing. Intense photoluminescence having a peak wavelength of around 430 nm was observed from a sample annealed at 600degC for 20 min. Tantalum oxide films that emit blue light can be useful as materials for novel active optical devices utilizing Ta2O5/SiO2 multilayered photonic crystals.
Keywords :
annealing; optical films; photoluminescence; sputter deposition; tantalum compounds; Ta2O5-SiO2; annealing; blue photoluminescence; multilayered photonic crystals; radio-frequency sputtering; tantalum oxide films; temperature 600 degC; time 20 min; Annealing; Crystalline materials; Fabrication; Optical devices; Optical films; Optical materials; Photoluminescence; Photonic crystals; Radio frequency; Sputtering;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
PhotonicsGlobal@Singapore, 2008. IPGC 2008. IEEE
Conference_Location :
Singapore
Print_ISBN :
978-1-4244-3901-0
Electronic_ISBN :
978-1-4244-2906-6
Type :
conf
DOI :
10.1109/IPGC.2008.4781359
Filename :
4781359
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=2713346
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