• DocumentCode
    2713346
  • Title

    Fabrication of Blue-Light Emitting Tantalum Oxide Films by Radio-Frequency Sputtering

  • Author

    Miura, K. ; Miyazaki, H. ; Hanaizumi, O.

  • Author_Institution
    Grad. Sch. of Eng., Gunma Univ., Kiryu
  • fYear
    2008
  • fDate
    8-11 Dec. 2008
  • Firstpage
    1
  • Lastpage
    3
  • Abstract
    We obtained blue photoluminescence from tantalum oxide films deposited by radio-frequency sputtering after annealing. Intense photoluminescence having a peak wavelength of around 430 nm was observed from a sample annealed at 600degC for 20 min. Tantalum oxide films that emit blue light can be useful as materials for novel active optical devices utilizing Ta2O5/SiO2 multilayered photonic crystals.
  • Keywords
    annealing; optical films; photoluminescence; sputter deposition; tantalum compounds; Ta2O5-SiO2; annealing; blue photoluminescence; multilayered photonic crystals; radio-frequency sputtering; tantalum oxide films; temperature 600 degC; time 20 min; Annealing; Crystalline materials; Fabrication; Optical devices; Optical films; Optical materials; Photoluminescence; Photonic crystals; Radio frequency; Sputtering;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    PhotonicsGlobal@Singapore, 2008. IPGC 2008. IEEE
  • Conference_Location
    Singapore
  • Print_ISBN
    978-1-4244-3901-0
  • Electronic_ISBN
    978-1-4244-2906-6
  • Type

    conf

  • DOI
    10.1109/IPGC.2008.4781359
  • Filename
    4781359
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2713346