DocumentCode
2713757
Title
An Embedded Suspended Micromachined Solenoid Inductor
Author
Zine-El-Abidine, Imed ; Okoniewski, Michal ; McRory, John G.
Author_Institution
Calgary Univ., Alta.
fYear
2006
fDate
11-16 June 2006
Firstpage
1137
Lastpage
1140
Abstract
A novel 3-D fabrication technique is presented to achieve very high quality factor and high inductance values for solenoid inductors. The solenoid inductor is at the same time embedded and suspended. Metal traces are deposited using a single plating step. Measured peak quality factor for the first generation of the device realized on low resistivity silicon substrate is 32. The 1 nH inductor has been fabricated with a one and a half turn solenoid
Keywords
Q-factor; inductors; micromachining; silicon; solenoids; 3D fabrication technique; embedded suspended micromachined solenoid inductor; metal traces; micromachining; quality factor; single plating step; Etching; Fabrication; Fingers; Inductance; Inductors; Micromachining; Q factor; Resists; Silicon; Solenoids; Inductors; micromachining; microwave circuits;
fLanguage
English
Publisher
ieee
Conference_Titel
Microwave Symposium Digest, 2006. IEEE MTT-S International
Conference_Location
San Francisco, CA
ISSN
0149-645X
Print_ISBN
0-7803-9541-7
Electronic_ISBN
0149-645X
Type
conf
DOI
10.1109/MWSYM.2006.249391
Filename
4015121
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