Title :
Fabrication of 2-D photonic crystal structure using LiNbO3 thin film on sapphire substrate
Author :
Murata, Hiroshi ; Kumagai, Hitoshi ; Nakanishi, Yusuke ; Okamura, Yasuyuki ; Suzuki, Asamira ; Enokihara, Akira
Author_Institution :
Grad. Sch. of Eng. Sci., Osaka Univ., Toyonaka
Abstract :
A 2-dimentional photonic crystal structure was fabricated using a c-axis oriented LiNbO3 thin film on a sapphire substrate. The dispersion characteristics in the fabricated photonic crystal structure were measured in detail by using the attenuated total reflection (ATR) method. The measurement results imply that the photonic band-gap was obtained for TE modes in the fabricated structure.
Keywords :
attenuated total reflection; lithium compounds; optical dispersion; optical fabrication; optical films; optical materials; optical waveguides; photonic band gap; photonic crystals; slabs; sputter etching; 2-D photonic crystal structure; 2-dimentional photonic crystal slab waveguide; Al2O3; LiNbO3; RF sputtering; TE modes; TM guided-modes; anomalous dispersion characteristics; attenuated total reflection method; c-axis oriented thin film; inductively coupled plasma dry-etching technique; photonic band-gap; sapphire substrate; Optical attenuators; Optical device fabrication; Optical devices; Optical films; Optical waveguides; Photonic band gap; Photonic crystals; Sputtering; Substrates; Transistors;
Conference_Titel :
PhotonicsGlobal@Singapore, 2008. IPGC 2008. IEEE
Conference_Location :
Singapore
Print_ISBN :
978-1-4244-3901-0
Electronic_ISBN :
978-1-4244-2906-6
DOI :
10.1109/IPGC.2008.4781445
