Title :
Microwave probe based on resonance section of pair line
Author :
Kondratyev, I.G. ; Kostrov, A.V. ; Smirnov, A.I.
Author_Institution :
Inst. of Appl. Phys., Acad. of Sci., Nizhny Novgorod, Russia
Abstract :
Described in the paper is the influence of gorge non-linear effects on the operation of a plasma resonance microwave probe based on the resonance section of a pair line, both theoretically and experimentally. It is shown that such a probe (in non-linear mode) can be used for measurement of plasma density, as well as plasma temperature. Resonance probes, used for plasma diagnostics are very sensitive even to minor changes in media parameters. Shifting and expanding of the resonance curve is the main data source in such sensors. The probe should introduce minimal perturbations into the surrounding plasma, though these perturbations can also be used for diagnostics. Described in this paper is a plasma resonance microwave probe based on the resonance section of a pair line. Even at a comparatively low exciting signal, non-linear effects appear. The authors have developed a non-linear theory of resonance microwave probes based on the resonance section of a pair line, and compared theoretical calculations with experimental results. It is shown that the non-linear mode can be used successfully for measurement of plasma density, as well as plasma temperature. The plasma density and temperature data, obtained by means of the microwave sensor under consideration, agrees well with the measurement results obtained using traditional single and double probes.
Keywords :
density measurement; microwave measurement; plasma density; plasma probes; plasma temperature; temperature measurement; electron temperature; gorge nonlinear effects; microwave sensors; nonlinear mode probe operation; pair line resonance section based microwave probes; plasma density measurement; plasma diagnostics; plasma perturbations; plasma resonance microwave probes; plasma temperature measurement; resonance curve shift; resonant curve expansion; Density measurement; Microwave theory and techniques; Plasma density; Plasma diagnostics; Plasma measurements; Plasma sources; Plasma temperature; Probes; Resonance; Temperature sensors;
Conference_Titel :
Microwave and Telecommunication Technology, 2002. CriMiCo 2002. 12th International Conference
Print_ISBN :
966-7968-12-X
DOI :
10.1109/CRMICO.2002.1137353