DocumentCode
2716373
Title
A comparison of electrostatic and magnetic actuation for micromechanical systems
Author
Ward, M.C.L. ; King, D.O.
Author_Institution
DRA, Malvern, UK
fYear
1995
fDate
34815
Firstpage
42461
Abstract
Summary form only given. Our work on integrated micromachined accelerometers has shown that for optimum performance it is necessary to run the accelerometers in a closed loop configuration. The use of such a closed loop system requires the incorporation of some form of actuator mechanism into the silicon micromachined device. In this paper we compare electrostatic and electromagnetic actuation which do not require the introduction of any ´non standard´ CMOS materials into the fabrication process
Keywords
accelerometers; microactuators; CMOS materials; Si; closed loop system; electromagnetic actuation; electrostatic actuation; fabrication; integrated accelerometers; micromechanical systems; silicon micromachined device;
fLanguage
English
Publisher
iet
Conference_Titel
Active Drives for Microengineering Applications, IEE Colloquium on
Conference_Location
London
Type
conf
DOI
10.1049/ic:19950570
Filename
478159
Link To Document