DocumentCode :
271638
Title :
Particle Movement in a Dusty RF Plasma at Power Switch-OFF
Author :
Lagrange, Jean-François ; Geraud-Grenier, Isabelle ; Faubert, François ; Massereau-Guilbaud, Véronique
Author_Institution :
Goupe de Rech. sur l´Energetique des Milieux Ionises, Univ. Orleans, Bourges, France
Volume :
42
Issue :
10
fYear :
2014
fDate :
Oct. 2014
Firstpage :
2674
Lastpage :
2675
Abstract :
Particles are generated in a capacitive radiofrequency methane-nitrogen discharge. Forces act on them; they levitate and form two clouds at the sheath boundaries close to the electrodes. In each cloud, particle size segregation is observed. At the plasma extinction, dust particle clouds show different movements. In addition, particle movement within each cloud depends on the particle size. The movements are due to the plasma extinction, the electrostatic interaction between clouds and the particle residual charge.
Keywords :
dusty plasmas; high-frequency discharges; nitrogen; organic compounds; plasma diagnostics; plasma sheaths; segregation; N2; capacitive radiofrequency methane-nitrogen discharge; dust particle clouds; dusty RF plasma; electrostatic interaction; particle residual charge; particle size segregation; plasma extinction; power switch-off; sheath boundaries; Clouds; Discharges (electric); Electrodes; Electrostatics; Lasers; Plasmas; Radio frequency; Dusty plasmas; particle charging; particle production; plasmas;
fLanguage :
English
Journal_Title :
Plasma Science, IEEE Transactions on
Publisher :
ieee
ISSN :
0093-3813
Type :
jour
DOI :
10.1109/TPS.2014.2342884
Filename :
6876178
Link To Document :
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