Title :
A monolithic visible, infrared and terahertz 2D detector
Author :
Perenzoni, Matteo ; Massari, Nicola ; Pocas, Stéphane ; Meilhan, Jérôme ; Simoens, François
Author_Institution :
Fondazione Bruno Kessler, Trento, Italy
Abstract :
A monolithic multispectral detector for imaging in the visible (VIS), infrared (IR) and terahertz (THz) ranges has been designed for operation at room temperature. This sensor is composed of a CMOS readout integrated circuit (ROIC) housing visible photodiodes and of IR and THz microbolometer pixels processed above the CMOS wafer. Without package- and system-level issues, targeted individual pixel sensitivities are respectively an 80dB dynamic range for VIS photodiodes, a NETD=50mK @f/1 for IR and a THz NEP smaller than 10pW. Prototyping chips will be integrated in tri-spectral imaging and THz spectroscopy demonstration systems.
Keywords :
CMOS integrated circuits; bolometers; infrared detectors; infrared imaging; monolithic integrated circuits; photodiodes; terahertz wave detectors; terahertz wave imaging; terahertz wave spectra; CMOS readout integrated circuit; CMOS wafer; IR microbolometer; THz microbolometer; THz spectroscopy demonstration system; VIS photodiodes; infrared imaging; monolithic multispectral detector; photodiodes; terahertz 2D detector; terahertz imaging; trispectral imaging; visible imaging; Bolometers; CMOS integrated circuits; Detectors; Imaging; Photodiodes; Pixel; Temperature sensors;
Conference_Titel :
Infrared Millimeter and Terahertz Waves (IRMMW-THz), 2010 35th International Conference on
Conference_Location :
Rome
Print_ISBN :
978-1-4244-6655-9
DOI :
10.1109/ICIMW.2010.5612874
