Title :
Adaptive high precision control for piezo-actuated nano-positioner
Author :
Ozaki, Toshikuni ; Chen, Xinkai
Author_Institution :
Grad. Sch., Shibaura Inst. of Technol., Saitama, Japan
Abstract :
The piezo-actuated nano-positioner is composed of a piezoelectric actuator (PEA) and a positioning mechanism (PM). Due to the existence of hysteretic nonlinearity in the PEA and the friction behavior in the PM, the accurate position control of the piezo-actuated stage is a challenging task. This paper discusses the adaptive control for the piezo-actuated nano-positioner, where the hysteresis is described by Prandtl-Ishlinskii model. The proposed control law ensures the zero output tracking of the controlled nano-positioner. Experimental results show the effectiveness of the proposed method.
Keywords :
adaptive control; nonlinear control systems; piezoelectric actuators; position control; PEA; PM; Prandtl-Ishlinskii model; adaptive control; adaptive high precision control; friction behavior; hysteretic nonlinearity; nanopositioner control; piezoactuated nanopositioner; piezoelectric actuator; positioning mechanism; Actuators; Adaptation model; Adaptive control; Hysteresis; Mathematical model; Polynomials;
Conference_Titel :
Intelligent Control (ISIC), 2010 IEEE International Symposium on
Conference_Location :
Yokohama
Print_ISBN :
978-1-4244-5360-3
Electronic_ISBN :
2158-9860
DOI :
10.1109/ISIC.2010.5612884
