Adaptive high precision control for piezo-actuated nano-positioner

Author

Ozaki, Toshikuni ; Chen, Xinkai

Author_Institution

Grad. Sch., Shibaura Inst. of Technol., Saitama, Japan

fYear

2010

fDate

8-10 Sept. 2010

Firstpage

2278

Lastpage

2283

Abstract

The piezo-actuated nano-positioner is composed of a piezoelectric actuator (PEA) and a positioning mechanism (PM). Due to the existence of hysteretic nonlinearity in the PEA and the friction behavior in the PM, the accurate position control of the piezo-actuated stage is a challenging task. This paper discusses the adaptive control for the piezo-actuated nano-positioner, where the hysteresis is described by Prandtl-Ishlinskii model. The proposed control law ensures the zero output tracking of the controlled nano-positioner. Experimental results show the effectiveness of the proposed method.

Keywords

adaptive control; nonlinear control systems; piezoelectric actuators; position control; PEA; PM; Prandtl-Ishlinskii model; adaptive control; adaptive high precision control; friction behavior; hysteretic nonlinearity; nanopositioner control; piezoactuated nanopositioner; piezoelectric actuator; positioning mechanism; Actuators; Adaptation model; Adaptive control; Hysteresis; Mathematical model; Polynomials;

fLanguage

English

Publisher

ieee

Conference_Titel

Intelligent Control (ISIC), 2010 IEEE International Symposium on

Conference_Location

Yokohama

ISSN

2158-9860

Print_ISBN

978-1-4244-5360-3

Electronic_ISBN

2158-9860

Type

conf

DOI

10.1109/ISIC.2010.5612884

Filename

5612884