Title :
Large area SrTiO3 thin films for active microwave applications grown by pulsed laser deposition
Author :
Knauss, L.A. ; Horwitz, J.S. ; Pond, J.M. ; Knies, D.L. ; Grabowski, K.S. ; Chrisey, D.B. ; Mueller, C.H.
Author_Institution :
Naval Res. Lab., Washington, DC, USA
Abstract :
Thin films of SrTiO3 have been grown by pulsed laser deposition (PLD) on 2" diameter LaAlO3 substrates using a technique in which the laser beam is rastered over the radius of a 4 inch diameter target while the substrate is rotated in a radiative blackbody heater. The deposition occurs through a pie shaped opening in the heater. The structure, composition and thickness have been measured using XRD and RBS. The dielectric properties of the film have been measured at 1 MHz utilizing an LCR meter. The results indicate that the films are single phase and (001) oriented. However, film composition, thickness and dielectric properties are not uniform along the radius of the film. The results indicate that the composition nonuniformity is due to off-axis deposition, and correlates with changes in the dielectric properties
Keywords :
Rutherford backscattering; X-ray diffraction; capacitance; ferroelectric thin films; pulsed laser deposition; strontium compounds; (001) orientation; 1 MHz; 2 inch; 4 inch; LCR meter; LaAlO3; LaAlO3 substrates; RBS; SrTiO3; XRD; active microwave applications; capacitance; composition nonuniformity; dielectric properties; large area SrTiO3 thin films; laser beam rastering; off-axis deposition; pie shaped opening; pulsed laser deposition; radiative blackbody heater; single phase films; structure; substrate rotation; thickness; Dielectric measurements; Electrodes; Fingers; Masers; Optical films; Optical pulses; Pulsed laser deposition; Sputtering; Substrates; Temperature;
Conference_Titel :
Applications of Ferroelectrics, 1996. ISAF '96., Proceedings of the Tenth IEEE International Symposium on
Conference_Location :
East Brunswick, NJ
Print_ISBN :
0-7803-3355-1
DOI :
10.1109/ISAF.1996.598152
