DocumentCode :
2718722
Title :
L and S band low-loss filters using SAW resonators
Author :
Matsuda, T. ; Uchishiba, H. ; Ikata, O. ; Nishihara, T. ; Satoh, Y.
Volume :
1
fYear :
1994
fDate :
Oct. 31 1994-Nov. 3 1994
Firstpage :
163
Abstract :
This paper describes L and S band low-loss filters using one-port SAW resonators in a ladder circuit structure. Four kinds of filters were developed. Three types have a wide frequency band, with fractional bandwidth of about 4%. A 36° y-x LiTaO3 substrate was used for these. The last type of filter has a narrow frequency band, with 0.03% of fractional bandwidth, and used an ST-cut quartz substrate. To design these ladder type SAW filters, several important factors were considered, the static capacitance of IDT, the period of IDT and film thickness. For fabrication, i-line stepper and reactive ion etching was used to delineate fine IDT patterns with line and gap width of 0.4 to 0.7 μm. Minimum insertion losses of 2 dB were obtained for the three wide band filters. The insertion loss of the narrow band filter was 6 dB. The input and output impedance of these filters were 50 Ω. The filters were mounted in 3 mm×3 mm×1 mm or 3.8 mm×3.8 mm×1.5 mm SMT packages
Keywords :
UHF filters; acoustic microwave devices; band-pass filters; capacitance; interdigital transducers; ladder filters; losses; surface acoustic wave resonator filters; 0.4 to 0.7 micron; 1.5 to 2.4 GHz; 2 dB; 36° y-x LiTaO3 substrate; IDT period; IDT static capacitance; L-band; LiTaO3; S-band; SAW resonators; SMT packages; ST-cut quartz substrate; SiO2; UHF; fabrication; film thickness; fine IDT patterns; i-line stepper; insertion loss; ladder circuit structure; low-loss filters; narrow band filter; one-port resonators; reactive ion etching; Bandpass filters; Capacitance; Interdigital transducers; Ladder filters; Losses; Surface acoustic wave resonator filters; UHF resonator filters;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Ultrasonics Symposium, 1994. Proceedings., 1994 IEEE
Conference_Location :
Cannes, France
Print_ISBN :
0-7803-2012-3
Type :
conf
DOI :
10.1109/ULTSYM.1994.401573
Filename :
401573
Link To Document :
بازگشت