Title :
Design of band-pass micromachined filters based on fixed-fixed beam resonators
Author :
Catoni, Simone ; Marcelli, Romolo ; Bartolucci, Giancarlo
Author_Institution :
Inst. for Microelectron. & Microsyst., Nat. Res. Council of Italy, Rome, Italy
Abstract :
Cascaded, two- and three-stages band-pass filters based on fixed-fixed beam micromechanical resonators have been designed for central frequencies F1=10 MHz and F2=20 MHz. Quality factors Q=500 have been predicted, under vacuum conditions, for a 3-dB bandwidth BW=0.2%. Insertion losses in the order of 1 to 2 dB have been evaluated.
Keywords :
band-pass filters; cascade networks; elemental semiconductors; equivalent circuits; micromechanical resonators; resonator filters; silicon; 1 to 2 dB; 10 MHz; 20 MHz; Si; band pass micromachined filters; cascaded band pass filters; equivalent circuits; fixed-fixed beam resonators; insertion losses; micromechanical resonators; polycrystalline silicon; quality factor; three stage band-pass filters; two stage band-pass filters; vacuum conditions; Band pass filters; Bandwidth; Circuits; Frequency; Large Hadron Collider; Mechanical systems; Q factor; Resonator filters; Silicon; Young´s modulus;
Conference_Titel :
Semiconductor Conference, 2004. CAS 2004 Proceedings. 2004 International
Print_ISBN :
0-7803-8499-7
DOI :
10.1109/SMICND.2004.1403062
