• DocumentCode
    2719202
  • Title

    Design of band-pass micromachined filters based on fixed-fixed beam resonators

  • Author

    Catoni, Simone ; Marcelli, Romolo ; Bartolucci, Giancarlo

  • Author_Institution
    Inst. for Microelectron. & Microsyst., Nat. Res. Council of Italy, Rome, Italy
  • Volume
    2
  • fYear
    2004
  • fDate
    4-6 Oct. 2004
  • Firstpage
    509
  • Abstract
    Cascaded, two- and three-stages band-pass filters based on fixed-fixed beam micromechanical resonators have been designed for central frequencies F1=10 MHz and F2=20 MHz. Quality factors Q=500 have been predicted, under vacuum conditions, for a 3-dB bandwidth BW=0.2%. Insertion losses in the order of 1 to 2 dB have been evaluated.
  • Keywords
    band-pass filters; cascade networks; elemental semiconductors; equivalent circuits; micromechanical resonators; resonator filters; silicon; 1 to 2 dB; 10 MHz; 20 MHz; Si; band pass micromachined filters; cascaded band pass filters; equivalent circuits; fixed-fixed beam resonators; insertion losses; micromechanical resonators; polycrystalline silicon; quality factor; three stage band-pass filters; two stage band-pass filters; vacuum conditions; Band pass filters; Bandwidth; Circuits; Frequency; Large Hadron Collider; Mechanical systems; Q factor; Resonator filters; Silicon; Young´s modulus;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Semiconductor Conference, 2004. CAS 2004 Proceedings. 2004 International
  • Print_ISBN
    0-7803-8499-7
  • Type

    conf

  • DOI
    10.1109/SMICND.2004.1403062
  • Filename
    1403062
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2719202