Title :
Optical MEMS technologies for multi-spectral infrared sensors
Author :
Faraone, L. ; Milne, J.S. ; Antoszewski, J. ; Dell, J.M.
Author_Institution :
Sch. of Electr., Electron. & Comput. Eng., Univ. of Western Australia, Crawley, WA, Australia
Abstract :
The technology for multi-spectral infrared sensors is presented. It includes the concept, modeling, experimental results as well as demonstration of an infrared sensor technology capable of low-voltage tuning across the SWIR and MWIR wavelength bands.
Keywords :
infrared detectors; microsensors; optical sensors; MWIR wavelength band; SWIR wavelength band; low-voltage tuning; multispectral infrared sensor; optical MEMS technology; Detectors; Mirrors; Optical device fabrication; Optical filters; Optical imaging; Optical sensors; Tuning;
Conference_Titel :
Infrared Millimeter and Terahertz Waves (IRMMW-THz), 2010 35th International Conference on
Conference_Location :
Rome
Print_ISBN :
978-1-4244-6655-9
DOI :
10.1109/ICIMW.2010.5612991
