Title :
An accelerometer interface circuit
Author :
Kemp, Christopher J. ; Spangler, Leland Chip
Author_Institution :
Ford Microelectron. Inc., Colorado Springs, CO, USA
Abstract :
This paper presents an interface circuit which converts the femtofarad-level signal from an accelerometer´s capacitive sense element to a pulse signal suitable for digital signal processing. Calibration circuitry compensates for the offset and sensitivity variations in the sense element and for packaging variability. The circuit has been fabricated in a 1.6 μm CMOS process. Test results show very low sensitivity to variations in temperature or supply voltage
Keywords :
CMOS integrated circuits; accelerometers; analogue-digital conversion; application specific integrated circuits; calibration; electric sensing devices; error compensation; microsensors; 1.6 micron; CMOS process; accelerometer interface circuit; calibration circuitry; capacitive sense element; femtofarad-level signal; offset compensation; pulse signal; sensitivity variations; Accelerometers; CMOS process; Calibration; Circuit testing; Digital signal processing; Packaging; Pulse circuits; Signal processing; Temperature sensors; Voltage;
Conference_Titel :
Custom Integrated Circuits Conference, 1995., Proceedings of the IEEE 1995
Conference_Location :
Santa Clara, CA
Print_ISBN :
0-7803-2584-2
DOI :
10.1109/CICC.1995.518199
