DocumentCode
2720136
Title
An accelerometer interface circuit
Author
Kemp, Christopher J. ; Spangler, Leland Chip
Author_Institution
Ford Microelectron. Inc., Colorado Springs, CO, USA
fYear
1995
fDate
1-4 May 1995
Firstpage
345
Lastpage
348
Abstract
This paper presents an interface circuit which converts the femtofarad-level signal from an accelerometer´s capacitive sense element to a pulse signal suitable for digital signal processing. Calibration circuitry compensates for the offset and sensitivity variations in the sense element and for packaging variability. The circuit has been fabricated in a 1.6 μm CMOS process. Test results show very low sensitivity to variations in temperature or supply voltage
Keywords
CMOS integrated circuits; accelerometers; analogue-digital conversion; application specific integrated circuits; calibration; electric sensing devices; error compensation; microsensors; 1.6 micron; CMOS process; accelerometer interface circuit; calibration circuitry; capacitive sense element; femtofarad-level signal; offset compensation; pulse signal; sensitivity variations; Accelerometers; CMOS process; Calibration; Circuit testing; Digital signal processing; Packaging; Pulse circuits; Signal processing; Temperature sensors; Voltage;
fLanguage
English
Publisher
ieee
Conference_Titel
Custom Integrated Circuits Conference, 1995., Proceedings of the IEEE 1995
Conference_Location
Santa Clara, CA
Print_ISBN
0-7803-2584-2
Type
conf
DOI
10.1109/CICC.1995.518199
Filename
518199
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