• DocumentCode
    2720329
  • Title

    Statistical worst-case simulation for CMOS technology

  • Author

    Welten, M. ; Clancy, R. ; Power, J.A. ; Mason, B. ; Stribley, P. ; Mathewson, A.

  • Author_Institution
    Nat. Microelectron. Res. Centre, Cork, Ireland
  • fYear
    1995
  • fDate
    34801
  • Firstpage
    42461
  • Lastpage
    42463
  • Abstract
    This paper presents a methodology for statistical worst-case simulation which accounts for the effects of statistical fluctuations in IC manufacturing processes. The inclusion of important SPICE model parameter correlations and the application of second order regression models give both realistic and more accurate worst-case parameter sets. Furthermore, a realistic prediction of circuit performance spread as well as an indication of the key process parameters that need to be monitored and controlled, are provided. The methodology consists of statistical techniques such as Principal Component Analysis and Box-Behnken designs. Finally, the principle of nonsense limits is incorporated to improve the accuracy of the predictions
  • Keywords
    CMOS integrated circuits; SPICE; semiconductor process modelling; statistical analysis; Box-Behnken design; CMOS technology; IC manufacturing processes; Principal Component Analysis; SPICE model; fluctuations; nonsense limits; regression model; statistical worst-case simulation;
  • fLanguage
    English
  • Publisher
    iet
  • Conference_Titel
    Improving the Efficiency of IC Manufacturing Technology, IEE Colloquium on
  • Conference_Location
    London
  • Type

    conf

  • DOI
    10.1049/ic:19950926
  • Filename
    478207