Title :
Identifying and quantifying variability within a BiCMOS process as part of a DFM strategy
Author :
Redford, Mark ; Fallon, Martin ; McGinty, Jim ; Walton, Anthony J. ; Newsam, M.I. ; Michalowicz, George ; MacGregor, Chic
Author_Institution :
Analog Process Technol. Dev., Nat. Semicond. (UK) Ltd., Greenock, UK
Abstract :
This paper presents a case study illustrating how the Design Of Experiments (DOE) in conjunction with Technology CAD (TCAD) can be used to identify sources of variability within a process that has been transferred into manufacturing. It will show how this approach can be used to study potential solutions to improve process performance and produce more robust and manufacturable processes
Keywords :
BiCMOS integrated circuits; circuit CAD; design for manufacture; design of experiments; electronic engineering computing; integrated circuit layout; integrated circuit manufacture; BiCMOS process; CAESAR; DFM strategy; RS/1 simulation; SUPREM-3 1D process simulator; design of experiments; manufacturable processes; process performance; technology CAD; variability sources;
Conference_Titel :
Improving the Efficiency of IC Manufacturing Technology, IEE Colloquium on
Conference_Location :
London
DOI :
10.1049/ic:19950932
