Indium Phosphide Optical MEMS for Chemical and Biological Sensing

Author

Siwak, Nathan ; McGee, Jonathan ; Ghodssi, Reza

Author_Institution

Dept. of Electr. & Comput. Eng., Maryland Univ., College Park, MD

fYear

2006

fDate

13-14 July 2006

Firstpage

1

Lastpage

2

Abstract

We present a resonant cantilever sensor for use in chemical and biological sensing applications. Electrostatically actuated suspended indium phosphide (InP) waveguides are used as the sensing cantilevers. This sensor uses an integrated optical detection scheme which eliminates the need for free space optical components seen in traditional systems. Discussions on device design as well as data collection methods are presented. Mass sensitivity in the range of Deltam = 6.6times10^-15 g is reported, comparable to similar cantilever sensor designs. Integration of waveguide cantilever sensors with on chip optical sources and detectors is also discussed

Keywords

III-V semiconductors; bioMEMS; biological techniques; cantilevers; chemical sensors; indium compounds; microsensors; optical sensors; waveguides; InP; biological sensing; chemical sensing; data collection methods; device design; electrostatically actuated suspended waveguides; indium phosphide optical MEMS; integrated optical detection; mass sensitivity; on chip optical detectors; on chip optical sources; resonant cantilever sensor; Biomedical optical imaging; Biosensors; Chemical and biological sensors; Indium phosphide; Integrated optics; Micromechanical devices; Optical detectors; Optical devices; Optical sensors; Optical waveguides;

fLanguage

English

Publisher

ieee

Conference_Titel

Life Science Systems and Applications Workshop, 2006. IEEE/NLM

Conference_Location

Bethesda, MD

Print_ISBN

1-4244-0277-8

Electronic_ISBN

1-4244-0278-6

Type

conf

DOI

10.1109/LSSA.2006.250369

Filename

4015840