Title :
Semiconductor Manufacturing Technology in the 21st Century
Author_Institution :
Frontier Collaborative Res. Center, Tokyo Inst. of Technol., Yokohama
Abstract :
This paper focuses on the future semiconductor manufacturing challenges. Some background information regarding the possible limits of scaling and the problems appeared in the sub-100 nm devices are discussed. The impacts of the future semiconductor manufacturing are discussed. We shall also look forward to the possible geographical redistribution of the manufacturing centers and the new role playing of the present leaders in IC technology. Paradigm of post-downsizing era is described
Keywords :
integrated circuit manufacture; integrated circuit technology; IC technology; geographical redistribution; manufacturing centers; post-downsizing era; semiconductor manufacturing technology; Artificial intelligence; Electron tubes; Electronic circuits; High speed integrated circuits; Integrated circuit technology; Intelligent robots; MOSFETs; Semiconductor device manufacture; Silicon; Ultra large scale integration;
Conference_Titel :
VLSI Technology, Systems, and Applications, 2006 International Symposium on
Conference_Location :
Hsinchu
Print_ISBN :
1-4244-0181-4
Electronic_ISBN :
1524-766X
DOI :
10.1109/VTSA.2006.251111
