DocumentCode
2721946
Title
3D System Integration Technologies
Author
Beyne, Eric
Author_Institution
IMEC, Leuven
fYear
2006
fDate
24-26 April 2006
Firstpage
1
Lastpage
9
Abstract
Electronic interconnection and packaging is mainly performed in a planar, 2D design style. Further miniaturization and performance enhancement of electronic systems will more and more require the use of 3D interconnection schemes. Key technologies for realizing true 3D interconnect schemes are the realization of vertical connections, either through the Si-die or through the multilayer interconnect with embedded die. Different applications require different complexities of 3D-interconnectivity. Therefore, different technologies may be used. These can be categorized as a more traditional packaging approach, a wafer-level-packaging, WLP (´above´ passivation), approach and a foundry level (´below´ passivation) approach. We define these technologies as respectively 3D-SIP, 3D-WLP and 3D-SIC. In this paper, these technologies are discussed in more detail
Keywords
integrated circuit interconnections; integrated circuit packaging; system-in-package; 3D SIC; 3D SIP; 3D WLP; 3D interconnection schemes; 3D system integration technologies; Si; electronic interconnection; electronic packaging; multilayer interconnect; vertical connections; wafer level packaging; CMOS technology; Electronics packaging; Integrated circuit interconnections; Nonhomogeneous media; Passivation; Semiconductor device packaging; Sensor arrays; Substrates; Tiles; Wiring;
fLanguage
English
Publisher
ieee
Conference_Titel
VLSI Technology, Systems, and Applications, 2006 International Symposium on
Conference_Location
Hsinchu
ISSN
1524-766X
Print_ISBN
1-4244-0181-4
Electronic_ISBN
1524-766X
Type
conf
DOI
10.1109/VTSA.2006.251113
Filename
4016586
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