• DocumentCode
    2721946
  • Title

    3D System Integration Technologies

  • Author

    Beyne, Eric

  • Author_Institution
    IMEC, Leuven
  • fYear
    2006
  • fDate
    24-26 April 2006
  • Firstpage
    1
  • Lastpage
    9
  • Abstract
    Electronic interconnection and packaging is mainly performed in a planar, 2D design style. Further miniaturization and performance enhancement of electronic systems will more and more require the use of 3D interconnection schemes. Key technologies for realizing true 3D interconnect schemes are the realization of vertical connections, either through the Si-die or through the multilayer interconnect with embedded die. Different applications require different complexities of 3D-interconnectivity. Therefore, different technologies may be used. These can be categorized as a more traditional packaging approach, a wafer-level-packaging, WLP (´above´ passivation), approach and a foundry level (´below´ passivation) approach. We define these technologies as respectively 3D-SIP, 3D-WLP and 3D-SIC. In this paper, these technologies are discussed in more detail
  • Keywords
    integrated circuit interconnections; integrated circuit packaging; system-in-package; 3D SIC; 3D SIP; 3D WLP; 3D interconnection schemes; 3D system integration technologies; Si; electronic interconnection; electronic packaging; multilayer interconnect; vertical connections; wafer level packaging; CMOS technology; Electronics packaging; Integrated circuit interconnections; Nonhomogeneous media; Passivation; Semiconductor device packaging; Sensor arrays; Substrates; Tiles; Wiring;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    VLSI Technology, Systems, and Applications, 2006 International Symposium on
  • Conference_Location
    Hsinchu
  • ISSN
    1524-766X
  • Print_ISBN
    1-4244-0181-4
  • Electronic_ISBN
    1524-766X
  • Type

    conf

  • DOI
    10.1109/VTSA.2006.251113
  • Filename
    4016586