Title :
Effect of Joule heating on electromigration reliability of Pb-free interconnect
Author :
Lu, Minhua ; Wright, Steven L. ; McVicker, Gerard ; Sri-Jayantha, Sri M.
Author_Institution :
IBM T. J. Watson Res. Center, Yorktown Heights, NY, USA
fDate :
May 29 2012-June 1 2012
Abstract :
Temperature and current are two major parameters that impact electromigration reliability. Due to the large current used in the accelerated electromigration test, the Joule self-heating associated with the stress current can be significant. The paper presents a study of electromigration fails in Pb-free interconnect from the point of view of localized Joule heating. The Joule heating effect in two types of packages, a fully assembled flip chip module with standard C4s and a silicon to silicon assembly with microbumps, is considered. A thermal FEM model is used as a guide to interpret the experimental observations.
Keywords :
electromigration; finite element analysis; flip-chip devices; integrated circuit interconnections; life testing; Joule self-heating; Pb-free interconnect; accelerated electromigration test; electromigration reliability; fully assembled flip chip module; localized Joule heating; microbumps; silicon to silicon assembly; stress current; thermal FEM model; Ovens; Resistance; Resistance heating; Stress; Temperature measurement; Temperature sensors;
Conference_Titel :
Electronic Components and Technology Conference (ECTC), 2012 IEEE 62nd
Conference_Location :
San Diego, CA
Print_ISBN :
978-1-4673-1966-9
Electronic_ISBN :
0569-5503
DOI :
10.1109/ECTC.2012.6248890