DocumentCode
2722395
Title
Effect of Joule heating on electromigration reliability of Pb-free interconnect
Author
Lu, Minhua ; Wright, Steven L. ; McVicker, Gerard ; Sri-Jayantha, Sri M.
Author_Institution
IBM T. J. Watson Res. Center, Yorktown Heights, NY, USA
fYear
2012
fDate
May 29 2012-June 1 2012
Firstpage
590
Lastpage
596
Abstract
Temperature and current are two major parameters that impact electromigration reliability. Due to the large current used in the accelerated electromigration test, the Joule self-heating associated with the stress current can be significant. The paper presents a study of electromigration fails in Pb-free interconnect from the point of view of localized Joule heating. The Joule heating effect in two types of packages, a fully assembled flip chip module with standard C4s and a silicon to silicon assembly with microbumps, is considered. A thermal FEM model is used as a guide to interpret the experimental observations.
Keywords
electromigration; finite element analysis; flip-chip devices; integrated circuit interconnections; life testing; Joule self-heating; Pb-free interconnect; accelerated electromigration test; electromigration reliability; fully assembled flip chip module; localized Joule heating; microbumps; silicon to silicon assembly; stress current; thermal FEM model; Ovens; Resistance; Resistance heating; Stress; Temperature measurement; Temperature sensors;
fLanguage
English
Publisher
ieee
Conference_Titel
Electronic Components and Technology Conference (ECTC), 2012 IEEE 62nd
Conference_Location
San Diego, CA
ISSN
0569-5503
Print_ISBN
978-1-4673-1966-9
Electronic_ISBN
0569-5503
Type
conf
DOI
10.1109/ECTC.2012.6248890
Filename
6248890
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