Advanced Substrate Engineering for the Nanotechnology Era

Engineered substrates is one of the most important innovations of the nanotechnology era driven by the vanishing boundary between substrate design and device architecture. SOI substrates, the first engineered substrates of its kind, have made possible an efficient optimization of MOSFET current drive while minimizing the leakage and reducing parasitic elements, thus enhancing the overall IC performance. Mobility enhancing substrates have added new handles to traditional scaling further improving device and IC performance. An overview of the advances in Smart Cut engineered substrates and the impact on device performance is given