• DocumentCode
    2722483
  • Title

    Effect of Oxygen Absorption on Contact Resistance between Metal and Carbon Nano Tubes (CNTs)

  • Author

    Bing-Yue Tsui ; Chien-Li Weng ; Jeng-Hua Wei ; Ming-Jinn Tsai

  • Author_Institution
    Dept. of Electron. Eng., Nat. Chiao Tung Univ., Hsinchu
  • fYear
    2006
  • fDate
    24-26 April 2006
  • Firstpage
    1
  • Lastpage
    2
  • Abstract
    Contact resistance (Rc) between metal and carbon nanotubes (CNTs) is studied extensively. Metal oxide formation at interface due to oxygen absorption plays very important role. Chemically inert metals such as Pt and Au results in the lowest Rc. Adding Ta into Pt can solve the adhesion issue while keeps low Rc . Those metals can break metal oxide and form metal carbide are also preferred
  • Keywords
    absorption; carbon nanotubes; contact resistance; platinum; tantalum; Pt; Ta; carbon nanotubes; contact resistance; inert metals; metal carbide formation; metal oxide formation; oxygen absorption; Absorption; Adhesives; Carbon nanotubes; Contact resistance; Electron tubes; Gold; Oxygen; Rapid thermal annealing; Testing; Thermal conductivity;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    VLSI Technology, Systems, and Applications, 2006 International Symposium on
  • Conference_Location
    Hsinchu
  • ISSN
    1524-766X
  • Print_ISBN
    1-4244-0181-4
  • Electronic_ISBN
    1524-766X
  • Type

    conf

  • DOI
    10.1109/VTSA.2006.251078
  • Filename
    4016614
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2722483