DocumentCode
2722525
Title
Driven structures using piezoelectric coatings
Author
Noteboom, R. ; Sayer, M. ; Barrow, D.A.
Author_Institution
Dept. of Phys., Queen´´s Univ., Kingston, Ont., Canada
Volume
2
fYear
1996
fDate
18-21 Aug 1996
Firstpage
951
Abstract
Flexure mode oscillations in steel membranes at frequencies in the kilohertz range can be induced by piezoelectric coatings. The application of such macroscopic structures in the design of film thickness deposition monitors are demonstrated
Keywords
membranes; piezoelectric oscillations; piezoelectric thin films; thickness measurement; vibrations; driven macroscopic structure; film thickness deposition monitor; flexure mode oscillation; piezoelectric coating; steel membrane; Biomembranes; Ceramics; Coatings; Damping; Electrodes; Frequency; Piezoelectric films; Steel; Substrates; Vibrations;
fLanguage
English
Publisher
ieee
Conference_Titel
Applications of Ferroelectrics, 1996. ISAF '96., Proceedings of the Tenth IEEE International Symposium on
Conference_Location
East Brunswick, NJ
Print_ISBN
0-7803-3355-1
Type
conf
DOI
10.1109/ISAF.1996.598184
Filename
598184
Link To Document