Adhesive flip chip bonding in a miniaturised spectrometer

Author

Rusanen, Outi ; Keränen, Kimmo ; Blomberg, Martti ; Lehto, Ari

Author_Institution

VTT Electron., Oulu, Finland

fYear

1997

fDate

26-30 Oct 1997

Firstpage

95

Lastpage

100

Abstract

This paper discusses the selection of a suitable isotropically conductive adhesive for flip chip bonding of a micromachined component. The adhesive must have adequate electrical conductivity and mechanical bonding strength. Most commercial adhesives possess these qualities. In addition, small bumps of spherical shape need to be dispensed evenly and repeatedly. Eight adhesives were studied and one suitable candidate was found. The manufacture of the spectrometers proceeded successfully. The interferometer was fixed on top of a silicon detector by a flip chip technique using an isotropically conductive adhesive. Two prototype series with a total of 25 spectrometers have been produced, and 23 of them passed operational testing

Keywords

adhesion; conducting polymers; electrical conductivity; elemental semiconductors; flip-chip devices; infrared detectors; infrared spectrometers; light interferometers; mechanical strength; microassembling; micromachining; microsensors; semiconductor device packaging; semiconductor device testing; silicon; Si; adhesive electrical conductivity; adhesive flip chip bonding; adhesive mechanical bonding strength; flip chip bonding; flip chip technique; interferometer; isotropically conductive adhesive; micromachined component; miniaturised spectrometer; operational testing; prototype spectrometers; silicon detector; spectrometer manufacture; spherical adhesive bumps; Bonding; Conductive adhesives; Conductivity; Detectors; Flip chip; Manufacturing; Prototypes; Shape; Silicon; Spectroscopy;

fLanguage

English

Publisher

ieee

Conference_Titel

Polymeric Electronics Packaging, 1997. Proceedings., The First IEEE International Symposium on

Conference_Location

Norrkoping

Print_ISBN

0-7803-3865-0

Type

conf

DOI

10.1109/PEP.1997.656479

Filename

656479