Title :
Pt deposition effect for the catalyst of the semiconducting oxygen sensor
Author :
Cho, Seong-Soon ; Kim, Ho-Gi
Author_Institution :
Dept. of Mater. Sci. & Eng., Korea Adv. Inst. of Sci. & Technol., Seoul, South Korea
Abstract :
La-doped SrTiO3 thick film has been studied from the viewpoint of its application for a lambda sensor, especially the effect of Pt deposition as a catalyst at low temperature. The as-deposited film was transformed into fine particles less than 0.1 μm and distributed very homogeneously on the surface. The response of the sensor was more symmetric and fastened with the aid of Pt particles. However, it was difficult to overcome the nonsymmetric behavior perfectly
Keywords :
catalysts; ferroelectric devices; ferroelectric semiconductors; gas sensors; platinum; sputtered coatings; strontium compounds; thick film devices; 0.1 mum; La-doped SrTiO3 thick film; O2; Pt; Pt deposition effect; SrTiO3:La; as-deposited film; catalyst; fine particles; lambda sensor; low temperature; nonsymmetric behavior; semiconducting oxygen sensor; Combustion; Magnetic sensors; Materials science and technology; Oxygen; Semiconductivity; Sensor phenomena and characterization; Sputtering; Temperature sensors; Thick film sensors; Thick films;
Conference_Titel :
Applications of Ferroelectrics, 1996. ISAF '96., Proceedings of the Tenth IEEE International Symposium on
Conference_Location :
East Brunswick, NJ
Print_ISBN :
0-7803-3355-1
DOI :
10.1109/ISAF.1996.598193
