• DocumentCode
    2724961
  • Title

    TCAD modeling of NPN-SiGe-HBT electrical performance improvement through extrinsic stress layer

  • Author

    Al-Sa´di, M. ; Fregonese, S. ; Maneux, C. ; Zimmer, T.

  • Author_Institution
    IMS Lab., Univ. of Bordeaux 1, Talence, France
  • fYear
    2010
  • fDate
    16-19 May 2010
  • Firstpage
    387
  • Lastpage
    390
  • Abstract
    The impact of introducing an extrinsic stress layer to NPN-SiGe-HBT device on the electrical properties and frequency response has been studied using TCAD modeling. Simulations based on Hydrodynamic (HD) and Drift-Diffusion (DD) models have been carried out to clarify the influence of adding the extrinsic stress layer on the device electrical performance (static and dynamic). Simulation results show that NPN-SiGe-HBT device with extrinsic stress layer exhibit better frequency characteristics in comparison with equivalent conventional HBT device (without extrinsic stress layer). An approximately, 3% improvement in ft, and 5% improvement in fmax have been achieved. In addition to that, a decrease in the transit time of the device has been observed. That can be fully accounted to the influence of introducing the extrinsic stress layer on the device.
  • Keywords
    frequency response; heterojunction bipolar transistors; hydrodynamics; technology CAD (electronics); HBT device; NPN-SiGe-HBT electrical performance improvement; TCAD modeling; drift-diffusion model; electrical properties; extrinsic stress layer; frequency response; hydrodynamic model; Compressive stress; Electron mobility; Etching; Fabrication; Frequency response; Germanium silicon alloys; Heterojunction bipolar transistors; Silicon germanium; Tensile strain; Tensile stress;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Microelectronics Proceedings (MIEL), 2010 27th International Conference on
  • Conference_Location
    Nis
  • Print_ISBN
    978-1-4244-7200-0
  • Type

    conf

  • DOI
    10.1109/MIEL.2010.5490457
  • Filename
    5490457