DocumentCode
2724961
Title
TCAD modeling of NPN-SiGe-HBT electrical performance improvement through extrinsic stress layer
Author
Al-Sa´di, M. ; Fregonese, S. ; Maneux, C. ; Zimmer, T.
Author_Institution
IMS Lab., Univ. of Bordeaux 1, Talence, France
fYear
2010
fDate
16-19 May 2010
Firstpage
387
Lastpage
390
Abstract
The impact of introducing an extrinsic stress layer to NPN-SiGe-HBT device on the electrical properties and frequency response has been studied using TCAD modeling. Simulations based on Hydrodynamic (HD) and Drift-Diffusion (DD) models have been carried out to clarify the influence of adding the extrinsic stress layer on the device electrical performance (static and dynamic). Simulation results show that NPN-SiGe-HBT device with extrinsic stress layer exhibit better frequency characteristics in comparison with equivalent conventional HBT device (without extrinsic stress layer). An approximately, 3% improvement in ft, and 5% improvement in fmax have been achieved. In addition to that, a decrease in the transit time of the device has been observed. That can be fully accounted to the influence of introducing the extrinsic stress layer on the device.
Keywords
frequency response; heterojunction bipolar transistors; hydrodynamics; technology CAD (electronics); HBT device; NPN-SiGe-HBT electrical performance improvement; TCAD modeling; drift-diffusion model; electrical properties; extrinsic stress layer; frequency response; hydrodynamic model; Compressive stress; Electron mobility; Etching; Fabrication; Frequency response; Germanium silicon alloys; Heterojunction bipolar transistors; Silicon germanium; Tensile strain; Tensile stress;
fLanguage
English
Publisher
ieee
Conference_Titel
Microelectronics Proceedings (MIEL), 2010 27th International Conference on
Conference_Location
Nis
Print_ISBN
978-1-4244-7200-0
Type
conf
DOI
10.1109/MIEL.2010.5490457
Filename
5490457
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