Title :
Progress towards achieving diamond waveguides
Author :
Hiscocks, M.P. ; Ladouceur, F. ; Ganesan, K. ; Gibson, B.C. ; Prawer, S.
Author_Institution :
Sch. of EE&T, UNSW, Sydney, NSW
Abstract :
We report on the progress made towards achieving light guidance in long diamond waveguides (i.e. > mm) fabricated using a combination of photolithography, reactive ion etching (RIE), ion implantation and FIB techniques.
Keywords :
diamond; focused ion beam technology; ion implantation; optical fabrication; optical waveguides; photolithography; ridge waveguides; sputter etching; C; FIB technique; diamond waveguides; ion implantation; light guidance; photolithography; reactive ion etching; Australia; Etching; Ion implantation; Lithography; Optical waveguides; Plasma applications; Plasma immersion ion implantation; Quantum computing; Resists; Silicon compounds;
Conference_Titel :
Opto-Electronics and Communications Conference, 2008 and the 2008 Australian Conference on Optical Fibre Technology. OECC/ACOFT 2008. Joint conference of the
Conference_Location :
Sydney
Print_ISBN :
978-0-85825-807-5
Electronic_ISBN :
978-0-85825-807-5
DOI :
10.1109/OECCACOFT.2008.4610558
