Title :
Effect of bottom electrodes on structures and electric properties of PLT ferroelectric thin films
Author :
Zhitang, Song ; Wei, Ren ; Xiaoqing, Wu ; Liangying, Zhang ; Xi, Yao
Author_Institution :
Electron. Mater. Res. Lab., Xi´´an Jiaotong Univ., China
Abstract :
Lead lanthanum titanate (PLT) thin film with 10 at.% of La and 15 at.% of excess Pb were deposited on Pt/Ti electrodes with different thickness of Ti layer by metallo-organic decomposition (MOD) process. X-ray diffraction (XRD) and scanning electron microscopy (SEM) have been applied to investigate the micro structure and morphology of the PLT thin films. The grain sizes of PLT thin films are between 0.9~1.5 μm. The thickness of the Ti layer has a dominant effect on the dielectric and ferroelectric properties of the PLT films. The dielectric constants of the thin films annealed at 550°C for 1 hr are between 510~580, the dielectric loss tangent is less than 2%. The remanent polarization is between 6.3~7.6 μm/cm2 and the coercive field is about 68.9~83.7 kV/cm at 1 kHz
Keywords :
X-ray diffraction; dielectric losses; ferroelectric thin films; grain size; lanthanum compounds; lead compounds; permittivity; scanning electron microscopy; 1 kHz; 550 C; PLT thin film; PbLaTiO3; Pt-Ti; X-ray diffraction; annealing; bottom electrode; coercive field; dielectric constant; dielectric loss tangent; ferroelectric properties; grain size; metallo-organic decomposition; microstructure; morphology; remanent polarization; scanning electron microscopy; Dielectric losses; Dielectric thin films; Electrodes; Lanthanum; Lead; Scanning electron microscopy; Sputtering; Titanium compounds; X-ray diffraction; X-ray scattering;
Conference_Titel :
Applications of Ferroelectrics, 1996. ISAF '96., Proceedings of the Tenth IEEE International Symposium on
Conference_Location :
East Brunswick, NJ
Print_ISBN :
0-7803-3355-1
DOI :
10.1109/ISAF.1996.598205
