DocumentCode
2726038
Title
Cu and Al-Cu composite-material interconnects for power devices
Author
Ling, Jamin ; Xu, Tao ; Chen, Raymond ; Valentin, Orlando ; Luechinger, Christoph
Author_Institution
Wedge Bonder Bus. Unit, Kulicke & Soffa Ind., Inc., Irvine, CA, USA
fYear
2012
fDate
May 29 2012-June 1 2012
Firstpage
1905
Lastpage
1911
Abstract
As power-device technology evolves toward higher power density and devices require longer product lifespans, improving interconnect technologies becomes an increasingly important priority. Several alternatives to the widely accepted aluminum (Al) wire interconnect are being considered. Aluminum ribbon offers the first step of performance improvement in specific applications due to its higher current-carrying capacity and superior heat dissipation and is proven in high volume production. The next level of improvement is aluminum copper (Al-Cu) wire or ribbon. The Al-Cu interconnect can be used with standard Al die metallization with a tested reliability improvement of 4-5 times over Al wire. However, a robust process is yet to be developed that will achieve sufficiently high yields. The final level of performance improvement is copper (Cu) wire and ribbon. Recently it was reported that Cu wire bonding can improve bond reliability more than tenfold over Al wire. Significant technical challenges must be overcome, however, before large-Cu-wire and ribbon bonding is suitable for high-volume production. Testing shows that large-Cu-wire bonding with bond heads made specifically for Cu wire is feasible, but due to the uncertain availability of suitably metallized die, a process assessment of production requirements has not been finalized. This paper examines the relative benefits and challenges of the Al, Al-Cu and Cu interconnect technologies. The results show that Al-Cu could be an attractive solution from a performance and cost standpoint with existing Al based die metallization. Process studies and test results show that many characteristics of Al-Cu are common to Cu bonding, making the process development a stepping stone to affirming the more challenging but higher performance Cu process.
Keywords
aluminium; copper; integrated circuit interconnections; integrated circuit reliability; power electronics; Al-Cu; aluminum copper ribbon; aluminum copper wire; aluminum wire interconnect; bond reliability; composite-material interconnects; current-carrying capacity; die metallization; heat dissipation; high volume production; high-volume production; power density; power-device technology; product lifespans; tested reliability improvement; Bonding; Force; Metallization; Silicon; Standards; Wires;
fLanguage
English
Publisher
ieee
Conference_Titel
Electronic Components and Technology Conference (ECTC), 2012 IEEE 62nd
Conference_Location
San Diego, CA
ISSN
0569-5503
Print_ISBN
978-1-4673-1966-9
Electronic_ISBN
0569-5503
Type
conf
DOI
10.1109/ECTC.2012.6249098
Filename
6249098
Link To Document