Title :
Contactless measurement of thin metallic films
Author :
Papez, V. ; Papezova, S.
Author_Institution :
Fac. of Electr. Eng., Dept. of Electrotechnol., CTU in Prague, Prague, Czech Republic
Abstract :
A thin layer measurement exploiting the change of complex coil impedance is a contactless method for conductive-layer diagnostics. The analysed sample is inserted into the leakage field of the coil. The coil impedance is evaluated by an electronic system. A special algorithm, ensuring the explicit evaluation of the measuring, is used for determining the layer thickness or sheet resistance.
Keywords :
electric resistance measurement; electrical conductivity; metallic thin films; complex coil impedance; conductive layer diagnostics; contactless measurement; sheet resistance; thin layer measurement; thin metallic films; Circuits; Coils; Conductive films; Conductivity measurement; Electrical resistance measurement; Frequency measurement; Impedance measurement; Loss measurement; Magnetic field measurement; Resonance;
Conference_Titel :
Microelectronics Proceedings (MIEL), 2010 27th International Conference on
Conference_Location :
Nis
Print_ISBN :
978-1-4244-7200-0
DOI :
10.1109/MIEL.2010.5490522
