• DocumentCode
    2727030
  • Title

    ESD flooring: an engineering evaluation

  • Author

    Robinson-Hahn, Donna

  • Author_Institution
    AT&T Microelectron., Allentown, PA, USA
  • fYear
    1995
  • fDate
    12-14 Sept. 1995
  • Firstpage
    154
  • Lastpage
    161
  • Abstract
    An integrated circuit (IC) can suffer catastrophic damage from as little as 50 volts while manufacturing personnel can generate over 10000 volts by simply walking across a production floor. This paper reports the results of an extensive two year study of over twenty reportedly ESD-safe floors that are used in combating this threat.
  • Keywords
    electrostatic discharge; human factors; integrated circuit manufacture; safety; surface charging; ESD flooring; ESD-safe floors; IC production; engineering evaluation; integrated circuit damage; manufacturing personnel; production floor; Electrostatic discharge; Integrated circuit manufacture; Legged locomotion; Personnel; Production;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Electrical Overstress/Electrostatic Discharge Symposium Proceedings, 1995
  • Conference_Location
    Phoenix, AZ, USA
  • Print_ISBN
    1-878303-59-7
  • Type

    conf

  • DOI
    10.1109/EOSESD.1995.478280
  • Filename
    478280
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2727030