Title :
Reduction of non-orthogonality effect in nanometrology system by modified optics and signal conditioner
Author :
Olyaee, Saeed ; Nejad, Shahram Mohammad
Author_Institution :
Dept. of Electr. Eng., Shahid Rajaee Teacher Training Univ., Tehran
Abstract :
Misalignment and deviation angle in the optical interferometer directly decrease the accuracy of nanometrology system by producing a periodic nonlinearity error. In this paper, the effect of non-orthogonally polarized beams on the displacement measurement error in the advanced nanometrology system is presented. A system for reduction of non-orthogonality effect including linear polarizer, half-wave plate and modified signal conditioner, based on the nonlinearity compensation in a two-mode laser interferometer, is also proposed. The simulations results confirm that the peak error in the nano-displacement measurement is considerably decreased from 0.89 nm to 15 pm by using the modified optics and signal conditioner.
Keywords :
displacement measurement; laser modes; light interferometers; light polarisation; measurement by laser beam; measurement errors; nanotechnology; optical polarisers; optical retarders; displacement measurement error; half-wave plate; linear polarizer; modified optics; nanodisplacement measurement; nanometrology; nonlinearity compensation; nonorthogonality effect; optical interferometer; periodic nonlinearity error; polarized beams; signal conditioner; two-mode laser interferometer; Biomedical optical imaging; Extraterrestrial measurements; High speed optical techniques; Laser beams; Laser modes; Laser theory; Optical interferometry; Optical mixing; Optical polarization; Space technology;
Conference_Titel :
Communication Systems, Networks and Digital Signal Processing, 2008. CNSDSP 2008. 6th International Symposium on
Conference_Location :
Graz
Print_ISBN :
978-1-4244-1875-6
Electronic_ISBN :
978-1-4244-1876-3
DOI :
10.1109/CSNDSP.2008.4610751
