DocumentCode
2728364
Title
Use of static-safe polymers in automated handling equipment
Author
Campbell, Richard W. ; Tan, Wayne
Author_Institution
Polymer Corp., Reading, PA, USA
fYear
1995
fDate
12-14 Sept. 1995
Firstpage
218
Lastpage
224
Abstract
Use of inherent static dissipative and antistatic polymers in automated handling equipment in a semiconductor manufacturing environment can minimize electrostatic discharge (ESD) hazards and improve product yield. These new ESD-safe polymers can replace many of the traditionally static generative materials in almost every application involving sensitive product handling.
Keywords
electrostatic discharge; polymers; safety; semiconductor device manufacture; antistatic polymers; automated handling equipment; electrostatic discharge hazards; product yield; safety; semiconductor manufacturing; static dissipative polymers; Electrostatic discharge; Hazards; Manufacturing automation; Polymers; Semiconductor device manufacture; Semiconductor materials;
fLanguage
English
Publisher
ieee
Conference_Titel
Electrical Overstress/Electrostatic Discharge Symposium Proceedings, 1995
Conference_Location
Phoenix, AZ, USA
Print_ISBN
1-878303-59-7
Type
conf
DOI
10.1109/EOSESD.1995.478288
Filename
478288
Link To Document