• DocumentCode
    2728364
  • Title

    Use of static-safe polymers in automated handling equipment

  • Author

    Campbell, Richard W. ; Tan, Wayne

  • Author_Institution
    Polymer Corp., Reading, PA, USA
  • fYear
    1995
  • fDate
    12-14 Sept. 1995
  • Firstpage
    218
  • Lastpage
    224
  • Abstract
    Use of inherent static dissipative and antistatic polymers in automated handling equipment in a semiconductor manufacturing environment can minimize electrostatic discharge (ESD) hazards and improve product yield. These new ESD-safe polymers can replace many of the traditionally static generative materials in almost every application involving sensitive product handling.
  • Keywords
    electrostatic discharge; polymers; safety; semiconductor device manufacture; antistatic polymers; automated handling equipment; electrostatic discharge hazards; product yield; safety; semiconductor manufacturing; static dissipative polymers; Electrostatic discharge; Hazards; Manufacturing automation; Polymers; Semiconductor device manufacture; Semiconductor materials;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Electrical Overstress/Electrostatic Discharge Symposium Proceedings, 1995
  • Conference_Location
    Phoenix, AZ, USA
  • Print_ISBN
    1-878303-59-7
  • Type

    conf

  • DOI
    10.1109/EOSESD.1995.478288
  • Filename
    478288