Title :
Best practices for applying air ionization
Author :
Steinman, Arnold
Author_Institution :
Ion Syst. Inc., Berkeley, CA, USA
Abstract :
Air ionizers are used throughout the semiconductor manufacturing process to control ESD and contamination. This papers reviews the "best practices" in applying ionizers in front-end and back-end applications in the semiconductor industry. Uses of room ionizers in cleanrooms, and point-of-use ionizers in production equipment will be discussed.
Keywords :
clean rooms; electrostatic discharge; ionisation; semiconductor device manufacture; surface contamination; ESD; air ionization; back-end applications; clean rooms; contamination; front-end applications; point-of-use ionizers; production equipment; room ionizers; semiconductor manufacturing; Best practices; Contamination; Electronics industry; Electrostatic discharge; Ionization; Manufacturing processes; Process control; Production equipment;
Conference_Titel :
Electrical Overstress/Electrostatic Discharge Symposium Proceedings, 1995
Conference_Location :
Phoenix, AZ, USA
Print_ISBN :
1-878303-59-7
DOI :
10.1109/EOSESD.1995.478292
