DocumentCode
2729091
Title
Best practices for applying air ionization
Author
Steinman, Arnold
Author_Institution
Ion Syst. Inc., Berkeley, CA, USA
fYear
1995
fDate
12-14 Sept. 1995
Firstpage
245
Lastpage
252
Abstract
Air ionizers are used throughout the semiconductor manufacturing process to control ESD and contamination. This papers reviews the "best practices" in applying ionizers in front-end and back-end applications in the semiconductor industry. Uses of room ionizers in cleanrooms, and point-of-use ionizers in production equipment will be discussed.
Keywords
clean rooms; electrostatic discharge; ionisation; semiconductor device manufacture; surface contamination; ESD; air ionization; back-end applications; clean rooms; contamination; front-end applications; point-of-use ionizers; production equipment; room ionizers; semiconductor manufacturing; Best practices; Contamination; Electronics industry; Electrostatic discharge; Ionization; Manufacturing processes; Process control; Production equipment;
fLanguage
English
Publisher
ieee
Conference_Titel
Electrical Overstress/Electrostatic Discharge Symposium Proceedings, 1995
Conference_Location
Phoenix, AZ, USA
Print_ISBN
1-878303-59-7
Type
conf
DOI
10.1109/EOSESD.1995.478292
Filename
478292
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