Detectivity Optimization of InGaAs Photon Emission Microscope Systems

Author

Tan, S.L. ; Yim, K.H. ; Chan, D.S.H. ; Phang, J.C.H. ; Zhou, Y. ; Balk, L.J. ; Chua, C.M. ; Koh, L.S.

Author_Institution

Centre for Integrated Circuit Failure Anal. & Reliability, National Univ. of Singapore

fYear

2006

fDate

3-7 July 2006

Firstpage

315

Lastpage

319

Abstract

Although photon emission microscope (PEM) systems are widely used in integrated circuit failure analysis, there is no known quantitative baseline to assess and compare the overall sensitivity performance of PEM systems. This paper describes a method to quantify the overall sensitivity of PEM systems based on spectral detectivity measurements. It has been applied to HgCdTe (MCT) and InGaAs PEM systems. It is also applied to an InGaAs PEM system to quantify the change in the detectivity of the InGaAs PEM system as the temperature of the detector changes. The method is also used to compare the signal to noise ratio of an emission image by normal time integration with digital integration where many frames of an emission image is added up to produce a single emission image

Keywords

II-VI semiconductors; III-V semiconductors; cadmium compounds; gallium arsenide; indium compounds; integrated optoelectronics; mercury compounds; optical variables measurement; photodetectors; tellurium compounds; HgCdTe; InGaAs; detectivity optimization; digital integration; emission image; integrated circuit failure analysis; normal time integration; photon emission microscope systems; sensitivity performance; signal to noise ratio; spectral detectivity measurements; Cooling; Costs; Detectors; Failure analysis; Indium gallium arsenide; Microscopy; Photonic band gap; Photonic integrated circuits; Signal to noise ratio; Silicon;

fLanguage

English

Publisher

ieee

Conference_Titel

Physical and Failure Analysis of Integrated Circuits, 2006. 13th International Symposium on the

Conference_Location

Singapore

Print_ISBN

1-4244-0205-0

Electronic_ISBN

1-4244-0206-9

Type

conf

DOI

10.1109/IPFA.2006.251053

Filename

4017078