Title :
DC-Coupled Laser Induced Detection System for Fault Localization in Microelectronic Failure Analysis
Author :
Quah, A.C.T. ; Koh, L.S. ; Chua, C.M. ; Palaniappan, M. ; Chin, J.M. ; Phang, J.C.H.
Author_Institution :
Centre for Integrated Circuit Failure Anal. & Reliability, National Univ. of Singapore
Abstract :
This paper describes a new dc-coupled laser induced detection system for fault localization in microelectronic failure analysis. This method removes artifacts inherent in ac-coupled detection systems and is capable of producing an accurate mapping of the laser induced resistance change of the devices without signal attenuation. This method is also capable of localizing large area faults without signal distortion
Keywords :
electric resistance measurement; failure analysis; fault diagnosis; integrated circuit reliability; measurement by laser beam; dc-coupled laser induced detection system; fault localization; laser induced resistance change; microelectronic failure analysis; Circuit faults; Failure analysis; Fault detection; Laser noise; Laser transitions; Microelectronics; Optical beams; Power lasers; Thermal resistance; Voltage;
Conference_Titel :
Physical and Failure Analysis of Integrated Circuits, 2006. 13th International Symposium on the
Conference_Location :
Singapore
Print_ISBN :
1-4244-0205-0
Electronic_ISBN :
1-4244-0206-9
DOI :
10.1109/IPFA.2006.250981
