• DocumentCode
    2730345
  • Title

    Application of Atomic Force Probing on 90nm DRAM Cell Failure Analysis

  • Author

    Yeh, Yu-Ching ; Lin, Chia-Lung ; Chen, Bi-Jen ; Tseng, Yuan-Wei ; Russell, Jeremy D.

  • fYear
    2006
  • fDate
    3-7 July 2006
  • Firstpage
    340
  • Lastpage
    343
  • Abstract
    This article presents a novel method to identify marginal faults in DRAM product via atomic force probing. Failing cells which are difficult to be identified by traditional methods were easily localized by current imaging. In addition, current-voltage curves were useful for judging failure root causes
  • Keywords
    DRAM chips; atomic force microscopy; failure analysis; 90 nm; DRAM failure analysis; atomic force probing; failure root causes; marginal faults; Atomic beams; Atomic force microscopy; Character generation; Failure analysis; Page description languages; Probes; Random access memory; Transistors; Tungsten; Virtual colonoscopy;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Physical and Failure Analysis of Integrated Circuits, 2006. 13th International Symposium on the
  • Conference_Location
    Singapore
  • Print_ISBN
    1-4244-0205-0
  • Electronic_ISBN
    1-4244-0206-9
  • Type

    conf

  • DOI
    10.1109/IPFA.2006.250983
  • Filename
    4017082
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2730345