Title :
Field models of power BAW resonators
Author :
Maricaru, M. ; Constantinescu, F. ; Nitescu, M. ; Florea, A.
Author_Institution :
Politeh. Univ., Bucharest
Abstract :
A linear electromechanical field model of an AlN piezoelectric resonator is developed in this paper. The values of the material parameters on the longitudinal direction have been validated by comparing the FEM results with the Mason multilayer model results and with small signal measurements. Various models for FEM analysis including transversal wave propagations are considered.
Keywords :
bulk acoustic wave devices; finite element analysis; resonators; AlN; FEM analysis; Mason multilayer model; bulk acoustic wave resonators; finite element methods; linear electromechanical field model; longitudinal direction; material parameters; piezoelectric resonator; power BAW resonators; small signal measurements; transversal wave propagations; Capacitive sensors; Crystallization; Elasticity; Lithium compounds; Matrix converters; Piezoelectric materials; Stress; Symmetric matrices; Titanium compounds; Vectors;
Conference_Titel :
Circuits and Systems for Communications, 2008. ECCSC 2008. 4th European Conference on
Conference_Location :
Bucharest
Print_ISBN :
978-1-4244-2419-1
Electronic_ISBN :
978-1-4244-2420-7
DOI :
10.1109/ECCSC.2008.4611672
