DocumentCode
2730585
Title
Field models of power BAW resonators
Author
Maricaru, M. ; Constantinescu, F. ; Nitescu, M. ; Florea, A.
Author_Institution
Politeh. Univ., Bucharest
fYear
2008
fDate
10-11 July 2008
Firstpage
180
Lastpage
184
Abstract
A linear electromechanical field model of an AlN piezoelectric resonator is developed in this paper. The values of the material parameters on the longitudinal direction have been validated by comparing the FEM results with the Mason multilayer model results and with small signal measurements. Various models for FEM analysis including transversal wave propagations are considered.
Keywords
bulk acoustic wave devices; finite element analysis; resonators; AlN; FEM analysis; Mason multilayer model; bulk acoustic wave resonators; finite element methods; linear electromechanical field model; longitudinal direction; material parameters; piezoelectric resonator; power BAW resonators; small signal measurements; transversal wave propagations; Capacitive sensors; Crystallization; Elasticity; Lithium compounds; Matrix converters; Piezoelectric materials; Stress; Symmetric matrices; Titanium compounds; Vectors;
fLanguage
English
Publisher
ieee
Conference_Titel
Circuits and Systems for Communications, 2008. ECCSC 2008. 4th European Conference on
Conference_Location
Bucharest
Print_ISBN
978-1-4244-2419-1
Electronic_ISBN
978-1-4244-2420-7
Type
conf
DOI
10.1109/ECCSC.2008.4611672
Filename
4611672
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